Research output per year
Research output per year
Search results
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2012
Ozone ALD of doped ZnO as a transparent metal
Yuan, H., Luo, B., Gladfelter, W. L. & Campbell, S. A., 2012, Dielectrics for Nanosystems 5: Materials Science, Processing, Reliability, and Manufacturing -and- Tutorials in Nanotechnology: More than Moore - Beyond CMOS Emerging Materials and Devices. 3 ed. Electrochemical Society Inc., p. 389-400 12 p. (ECS Transactions; vol. 45, no. 3).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
4 Scopus citations