Advanced Kinetic Methods for Efficient Modeling of Low Pressure Discharges

ABSTRACT Proposal Number: ECS-9713137 Principal Investigator: Uwe Kortshagen Title: Advanced kinetic methods for efficient modeling of low pressure discharges In this research, mathematical methods to describe the electron kinetics in the intermediate regime between low neutral densities and high neutral densities will be developed. The low pressure discharges used for plasma processing fall into the intermediate regime and there are currently no existing models which are accurate for this regime. The methods developed will be rigorously checked against Monte Carlo simulations, and against experiments.