A combinative technique to fabricate hot embossing master for PMMA tunneling sensors

Physics & Astronomy

• embossing 92%
• polymethyl methacrylate 71%
• etching 51%
• membrane structures 46%
• sensors 41%
• pyramids 38%
• plasma etching 38%
• photolithography 37%
• silicon 36%
• photoresists 35%
• deflection 30%
• masks 29%
• transducers 27%
• wafers 25%
• polymers 19%
• profiles 18%
• electric potential 18%

Engineering & Materials Science

• Polymethyl methacrylates 90%
• Etching 73%
• Silicon 53%
• Plasma etching 50%
• Membrane structures 47%
• Photoresists 43%
• Photolithography 42%
• Sensors 35%
• Transducers 32%
• Masks 32%
• Polymers 24%
• Electric potential 17%

Chemical Compounds

• Embossing 100%
• Tunneling 69%
• Etching 61%
• Tunneling Current 35%
• Pyramidal Crystal 25%
• Voltage 16%
• Plasma 14%
• Surface 7%