A CPW T-resonator technique for electrical characterization of microwave substrates

Rebecca Lorenz Peterson; Rhonda Franklin Drayton

doi:10.1109/7260.989861

A CPW T-resonator technique for electrical characterization of microwave substrates

Rebecca Lorenz Peterson, Rhonda Franklin Drayton

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

35 Scopus citations

Abstract

An impedance independent method is proposed using a finite ground coplanar waveguide (CPW) T-resonator to electrically characterize microwave materials. Silicon-based CPW T-resonators are designed and measured, with calibrated data agreeing well with other methods up to 30 GHz. Uncalibrated measurements produce dielectric constant and attenuation results within 3.7% and 25%, respectively, of those obtained with calibration. Hence, the CPW T-resonator can be used to provide rapid and accurate characterization of microwave substrates with unknown dielectric properties.

Original language	English (US)
Pages (from-to)	90-92
Number of pages	3
Journal	IEEE Microwave and Wireless Components Letters
Volume	12
Issue number	3
DOIs	https://doi.org/10.1109/7260.989861
State	Published - Mar 2002

Bibliographical note

Funding Information:
Manuscript received August 11, 2001; revised December 13, 2001. This work was supported by fellowships from the National Science Foundation (NSF) and Automatic RF Techniques Group (ARFTG) and by the NSF (ECS 9996017) and Dupont Educational Aid Grants. The review of this letter was arranged by Associate Editor Dr. Shigeo Kawasaki.

Keywords

Coplanar waveguide
Dielectric constant
Resonators
Semiconductor material measurements

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abstract = "An impedance independent method is proposed using a finite ground coplanar waveguide (CPW) T-resonator to electrically characterize microwave materials. Silicon-based CPW T-resonators are designed and measured, with calibrated data agreeing well with other methods up to 30 GHz. Uncalibrated measurements produce dielectric constant and attenuation results within 3.7% and 25%, respectively, of those obtained with calibration. Hence, the CPW T-resonator can be used to provide rapid and accurate characterization of microwave substrates with unknown dielectric properties.",

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A CPW T-resonator technique for electrical characterization of microwave substrates

Abstract

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Keywords

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