A low-cost hands-on laboratory to introduce lithography concepts

Maryam Jalali; James J. Marti; Allison L. Kirchhoff; Frances Lawrenz; Stephen A. Campbell

doi:10.1109/TE.2012.2192442

A low-cost hands-on laboratory to introduce lithography concepts

Maryam Jalali, James J. Marti, Allison L. Kirchhoff, Frances Lawrenz, Stephen A. Campbell

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

A lithography lab course has been developed that is applicable to students from the middle-school level up to college students. It can also be inserted into electronics technology or similar courses in two- and four-year colleges, or used to demonstrate applications of polymers in chemistry classes. Some of these techniques would enable research projects that involve photolithography for those who lack access to a research lab. The major contribution of this course is the innovative methodology, which allows students to have a hands-on experience of lithographywithout using expensive equipment typically found only in a clean room. Optical lithography, microcontact printing, and embossing can be performed using basic equipment. The appendix of this paper provides a comprehensive list of this equipment. The photolithography results are comparable to those obtained with standard research tools.

Original language	English (US)
Pages (from-to)	517-524
Number of pages	8
Journal	IEEE Transactions on Education
Volume	55
Issue number	4
DOIs	https://doi.org/10.1109/TE.2012.2192442
State	Published - 2012

Bibliographical note

Funding Information:
Manuscript received February 20, 2012; accepted March 08, 2012. Date of publication April 16, 2012; date of current version October 26, 2012. This work was supported by the Nano-Link Advanced Technical Education Center, funded by the National Science Foundation under Award #0802323. M. Jalali and S. A. Campbell are with the Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, MN 55455 USA (e-mail: scampbell@umn.edu). J. J. Marti is with the Nanofabrication Center, University of Minnesota, Minneapolis, MN 55455 USA. A. L. Kirchhoff and F. Lawrenz are with Department of Educational Psychology, University of Minnesota, Minneapolis, MN 55455 USA. Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/TE.2012.2192442

Keywords

Hot embossing
Lithography
Microelectromechanical systems (MEMS)
Microfabrication
Microimprint

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access

10.1109/TE.2012.2192442

OpenUrl availability

Full text

Cite this

@article{157a87c2670049eeb4a0ee896f6f6692,

title = "A low-cost hands-on laboratory to introduce lithography concepts",

abstract = "A lithography lab course has been developed that is applicable to students from the middle-school level up to college students. It can also be inserted into electronics technology or similar courses in two- and four-year colleges, or used to demonstrate applications of polymers in chemistry classes. Some of these techniques would enable research projects that involve photolithography for those who lack access to a research lab. The major contribution of this course is the innovative methodology, which allows students to have a hands-on experience of lithographywithout using expensive equipment typically found only in a clean room. Optical lithography, microcontact printing, and embossing can be performed using basic equipment. The appendix of this paper provides a comprehensive list of this equipment. The photolithography results are comparable to those obtained with standard research tools.",

keywords = "Hot embossing, Lithography, Microelectromechanical systems (MEMS), Microfabrication, Microimprint",

author = "Maryam Jalali and Marti, {James J.} and Kirchhoff, {Allison L.} and Frances Lawrenz and Campbell, {Stephen A.}",

note = "Funding Information: Manuscript received February 20, 2012; accepted March 08, 2012. Date of publication April 16, 2012; date of current version October 26, 2012. This work was supported by the Nano-Link Advanced Technical Education Center, funded by the National Science Foundation under Award #0802323. M. Jalali and S. A. Campbell are with the Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, MN 55455 USA (e-mail: scampbell@umn.edu). J. J. Marti is with the Nanofabrication Center, University of Minnesota, Minneapolis, MN 55455 USA. A. L. Kirchhoff and F. Lawrenz are with Department of Educational Psychology, University of Minnesota, Minneapolis, MN 55455 USA. Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/TE.2012.2192442",

year = "2012",

doi = "10.1109/TE.2012.2192442",

language = "English (US)",

volume = "55",

pages = "517--524",

journal = "IEEE Transactions on Education",

issn = "0018-9359",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "4",

}

TY - JOUR

T1 - A low-cost hands-on laboratory to introduce lithography concepts

AU - Jalali, Maryam

AU - Marti, James J.

AU - Kirchhoff, Allison L.

AU - Lawrenz, Frances

AU - Campbell, Stephen A.

N1 - Funding Information: Manuscript received February 20, 2012; accepted March 08, 2012. Date of publication April 16, 2012; date of current version October 26, 2012. This work was supported by the Nano-Link Advanced Technical Education Center, funded by the National Science Foundation under Award #0802323. M. Jalali and S. A. Campbell are with the Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, MN 55455 USA (e-mail: scampbell@umn.edu). J. J. Marti is with the Nanofabrication Center, University of Minnesota, Minneapolis, MN 55455 USA. A. L. Kirchhoff and F. Lawrenz are with Department of Educational Psychology, University of Minnesota, Minneapolis, MN 55455 USA. Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/TE.2012.2192442

PY - 2012

Y1 - 2012

N2 - A lithography lab course has been developed that is applicable to students from the middle-school level up to college students. It can also be inserted into electronics technology or similar courses in two- and four-year colleges, or used to demonstrate applications of polymers in chemistry classes. Some of these techniques would enable research projects that involve photolithography for those who lack access to a research lab. The major contribution of this course is the innovative methodology, which allows students to have a hands-on experience of lithographywithout using expensive equipment typically found only in a clean room. Optical lithography, microcontact printing, and embossing can be performed using basic equipment. The appendix of this paper provides a comprehensive list of this equipment. The photolithography results are comparable to those obtained with standard research tools.

AB - A lithography lab course has been developed that is applicable to students from the middle-school level up to college students. It can also be inserted into electronics technology or similar courses in two- and four-year colleges, or used to demonstrate applications of polymers in chemistry classes. Some of these techniques would enable research projects that involve photolithography for those who lack access to a research lab. The major contribution of this course is the innovative methodology, which allows students to have a hands-on experience of lithographywithout using expensive equipment typically found only in a clean room. Optical lithography, microcontact printing, and embossing can be performed using basic equipment. The appendix of this paper provides a comprehensive list of this equipment. The photolithography results are comparable to those obtained with standard research tools.

KW - Hot embossing

KW - Lithography

KW - Microelectromechanical systems (MEMS)

KW - Microfabrication

KW - Microimprint

UR - http://www.scopus.com/inward/record.url?scp=84898798183&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84898798183&partnerID=8YFLogxK

U2 - 10.1109/TE.2012.2192442

DO - 10.1109/TE.2012.2192442

M3 - Article

AN - SCOPUS:84898798183

SN - 0018-9359

VL - 55

SP - 517

EP - 524

JO - IEEE Transactions on Education

JF - IEEE Transactions on Education

IS - 4

ER -

A low-cost hands-on laboratory to introduce lithography concepts

Abstract

Bibliographical note

Keywords

UN SDGs

Access

OpenUrl availability

Other files and links

Fingerprint

Cite this