TY - JOUR
T1 - Characterization of compressible flow through microscale orifice arrays
AU - Hagstrom, Nathan P.
AU - Gallagher, Matthew L.
AU - Chase, Thomas R.
N1 - Publisher Copyright:
© 2023 Elsevier Inc.
PY - 2023/10
Y1 - 2023/10
N2 - Compressible flow through arrays of circular micro-orifices was experimentally and numerically studied to better understand how the characteristic dimensions of micro-orifices used in macroscale fluidic systems using a plurality of micro-orifices impacts discharge coefficient. The studies were carried out with micro-orifice diameters ranging from 125 μm to 1000 μm, with the number of micro-orifices in an array ranging from 2 to 64, and at gauge inlet pressures ranging from 25 to 600 kPa venting to atmospheric pressure. Results showed that micro-orifice diameter to thickness aspect ratio and wall profile were significant factors in determining discharge coefficient. The number of micro-orifices in a system was found to have negligible impact on discharge coefficient so long as the micro-orifices were separated by two diameters or more. When this spacing was maintained, two dimensional axisymmetric micro-orifice numerical studies produced discharge coefficients that agreed well with experimental data gathered on three dimensional micro-orifice arrays. The micro-orifice arrays produced discharge coefficients as high as 0.997 using photochemically etched micro-orifices, 0.981 using silicon etched micro-orifices, and 0.831 with drilled micro-orifices.
AB - Compressible flow through arrays of circular micro-orifices was experimentally and numerically studied to better understand how the characteristic dimensions of micro-orifices used in macroscale fluidic systems using a plurality of micro-orifices impacts discharge coefficient. The studies were carried out with micro-orifice diameters ranging from 125 μm to 1000 μm, with the number of micro-orifices in an array ranging from 2 to 64, and at gauge inlet pressures ranging from 25 to 600 kPa venting to atmospheric pressure. Results showed that micro-orifice diameter to thickness aspect ratio and wall profile were significant factors in determining discharge coefficient. The number of micro-orifices in a system was found to have negligible impact on discharge coefficient so long as the micro-orifices were separated by two diameters or more. When this spacing was maintained, two dimensional axisymmetric micro-orifice numerical studies produced discharge coefficients that agreed well with experimental data gathered on three dimensional micro-orifice arrays. The micro-orifice arrays produced discharge coefficients as high as 0.997 using photochemically etched micro-orifices, 0.981 using silicon etched micro-orifices, and 0.831 with drilled micro-orifices.
KW - Compressible flow
KW - Discharge coefficient
KW - Orifice
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U2 - 10.1016/j.ijheatfluidflow.2023.109173
DO - 10.1016/j.ijheatfluidflow.2023.109173
M3 - Article
AN - SCOPUS:85164241739
SN - 0142-727X
VL - 103
JO - International Journal of Heat and Fluid Flow
JF - International Journal of Heat and Fluid Flow
M1 - 109173
ER -