Charging, coagulation, and heating model of nanoparticles in a low-Pressure plasma accounting for Ion-Neutral collisions

Physics & Astronomy

• coagulation 100%
• charging 81%
• low pressure 73%
• nanoparticles 59%
• collisions 56%
• heating 55%
• ions 41%
• argon plasma 18%
• silanes 17%
• electron-ion recombination 11%
• dusty plasmas 9%
• particle size distribution 8%
• silicon 8%
• ion currents 8%
• charge distribution 7%
• proximity 7%
• crystallinity 7%
• temperature 7%
• orbits 5%
• synthesis 5%
• cooling 5%
• causes 4%
• predictions 4%