| Original language | English (US) |
|---|---|
| Pages (from-to) | 747-749 |
| Number of pages | 3 |
| Journal | Chemistry of Materials |
| Volume | 4 |
| Issue number | 4 |
| DOIs | |
| State | Published - Feb 1 1992 |
Chemical Vapor Deposition of Thin Films of Ruthenium and Formation of an Unexpected Byproduct Using Hexafluoro-2-butynetetracarbonyl-ruthenium(0)
Yoshihide Senzaki, Wayne L. Gladfelter, Fred B. McCormick
Research output: Contribution to journal › Article › peer-review
19
Scopus
citations