Compact floating ion energy analyzer for measuring energy distributions of ions bombarding radio-frequency biased electrode surfaces

Erik A. Edelberg; Andrew Perry; Neil Benjamin; Eray S. Aydil

doi:10.1063/1.1149829

Compact floating ion energy analyzer for measuring energy distributions of ions bombarding radio-frequency biased electrode surfaces

Erik A. Edelberg, Andrew Perry, Neil Benjamin, Eray S. Aydil

Chemical Engineering and Materials Science

Research output: Contribution to journal › Article › peer-review

46 Scopus citations

Abstract

The energy distribution of ions bombarding radio-frequency biased electrodes in high-density plasma reactors are measured using a compact floating retarding ion energy analyzer. The design of the analyzer, its operation and capabilities are discussed.

Original language	English (US)
Pages (from-to)	2689-2698
Number of pages	10
Journal	Review of Scientific Instruments
Volume	70
Issue number	6
DOIs	https://doi.org/10.1063/1.1149829
State	Published - Jun 1999

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title = "Compact floating ion energy analyzer for measuring energy distributions of ions bombarding radio-frequency biased electrode surfaces",

abstract = "The energy distribution of ions bombarding radio-frequency biased electrodes in high-density plasma reactors are measured using a compact floating retarding ion energy analyzer. The design of the analyzer, its operation and capabilities are discussed.",

author = "Edelberg, {Erik A.} and Andrew Perry and Neil Benjamin and Aydil, {Eray S.}",

year = "1999",

month = jun,

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T1 - Compact floating ion energy analyzer for measuring energy distributions of ions bombarding radio-frequency biased electrode surfaces

AU - Edelberg, Erik A.

AU - Perry, Andrew

AU - Benjamin, Neil

AU - Aydil, Eray S.

PY - 1999/6

Y1 - 1999/6

N2 - The energy distribution of ions bombarding radio-frequency biased electrodes in high-density plasma reactors are measured using a compact floating retarding ion energy analyzer. The design of the analyzer, its operation and capabilities are discussed.

AB - The energy distribution of ions bombarding radio-frequency biased electrodes in high-density plasma reactors are measured using a compact floating retarding ion energy analyzer. The design of the analyzer, its operation and capabilities are discussed.

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DO - 10.1063/1.1149829

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JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 6

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Compact floating ion energy analyzer for measuring energy distributions of ions bombarding radio-frequency biased electrode surfaces

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