Cyclical Thinning of Black Phosphorus with High Spatial Resolution for Heterostructure Devices

Matthew C. Robbins; Seon Namgung; Sang Hyun Oh; Steven J. Koester

doi:10.1021/acsami.6b14477

Cyclical Thinning of Black Phosphorus with High Spatial Resolution for Heterostructure Devices

Matthew C. Robbins, Seon Namgung, Sang Hyun Oh, Steven J. Koester

Research output: Contribution to journal › Article › peer-review

17 Scopus citations

Abstract

A high spatial resolution, cyclical thinning method for realizing black phosphorus (BP) heterostructures is reported. This process utilizes a cyclic technique involving BP surface oxidation and vacuum annealing to create BP flakes as thin as 1.6 nm. The process also utilizes a spatially patternable mask created by evaporating Al that oxidizes to form Al₂O₃, which stabilizes the unetched BP regions and enables the formation of lateral heterostructures with spatial resolution as small as 150 nm. This thinning/patterning technique has also been used to create the first-ever lateral heterostructure BP metal oxide semiconductor field-effect transistor (MOSFET), in which half of a BP flake was thinned in order to increase its band gap. This heterostructure MOSFET showed an ON/OFF current ratio improvement of 1000× compared to homojunction MOSFETs.

Original language	English (US)
Pages (from-to)	12654-12662
Number of pages	9
Journal	ACS Applied Materials and Interfaces
Volume	9
Issue number	14
DOIs	https://doi.org/10.1021/acsami.6b14477
State	Published - Apr 12 2017

Bibliographical note

Funding Information:
This work was partially supported by the Air Force Office of Scientific Research under Award FA9550-14-1-0277 the National Science Foundation (NSF) under Grant ECCS-1102278, and the NSF through the University of Minnesota MRSEC under Award DMR-1420013. Device fabrication was carried out in the Minnesota Nano Center, which receives partial support from NSF through National Nanotechnology Coordinated Infrastructure (NNCI).

Publisher Copyright:
© 2017 American Chemical Society.

Keywords

2D material
black phosphorus
heterostructure
MOSFET
phosphorene

How much support was provided by MRSEC?

Partial

Reporting period for MRSEC

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PubMed: MeSH publication types

Journal Article

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10.1021/acsami.6b14477

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Cite this

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abstract = "A high spatial resolution, cyclical thinning method for realizing black phosphorus (BP) heterostructures is reported. This process utilizes a cyclic technique involving BP surface oxidation and vacuum annealing to create BP flakes as thin as 1.6 nm. The process also utilizes a spatially patternable mask created by evaporating Al that oxidizes to form Al2O3, which stabilizes the unetched BP regions and enables the formation of lateral heterostructures with spatial resolution as small as 150 nm. This thinning/patterning technique has also been used to create the first-ever lateral heterostructure BP metal oxide semiconductor field-effect transistor (MOSFET), in which half of a BP flake was thinned in order to increase its band gap. This heterostructure MOSFET showed an ON/OFF current ratio improvement of 1000× compared to homojunction MOSFETs.",

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author = "Robbins, {Matthew C.} and Seon Namgung and Oh, {Sang Hyun} and Koester, {Steven J.}",

note = "Funding Information: This work was partially supported by the Air Force Office of Scientific Research under Award FA9550-14-1-0277 the National Science Foundation (NSF) under Grant ECCS-1102278, and the NSF through the University of Minnesota MRSEC under Award DMR-1420013. Device fabrication was carried out in the Minnesota Nano Center, which receives partial support from NSF through National Nanotechnology Coordinated Infrastructure (NNCI). Publisher Copyright: {\textcopyright} 2017 American Chemical Society.",

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Cyclical Thinning of Black Phosphorus with High Spatial Resolution for Heterostructure Devices

Abstract

Bibliographical note

Keywords

How much support was provided by MRSEC?

Reporting period for MRSEC

PubMed: MeSH publication types

Access

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Other files and links

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MRSEC IRG-1: Electrostatic Control of Materials

University of Minnesota MRSEC (DMR-1420013)

Cite this

Cyclical Thinning of Black Phosphorus with High Spatial Resolution for Heterostructure Devices

Abstract

Bibliographical note

Keywords

How much support was provided by MRSEC?

Reporting period for MRSEC

PubMed: MeSH publication types

Access

OpenUrl availability

Other files and links

Fingerprint

Projects

MRSEC IRG-1: Electrostatic Control of Materials

University of Minnesota MRSEC (DMR-1420013)

Cite this