Deposition of AlN thin films with cubic crystal structures on silicon substrates at room temperature

Zhong Min Ren, Yong Feng Lu, Yeow Whatt Goh, Tow Chong Chong, Mei Ling Ng, Jian Ping Wang, Boon Aik Cheong, Yun Fook Liew

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

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