Enhancement in optical characteristics of c-axis-oriented radio frequency–sputtered ZnO thin films through growth ambient and annealing temperature optimization

Engineering & Materials Science

• Photoluminescence 100%
• Annealing 91%
• Thin films 87%
• Linewidth 77%
• Oxygen 49%
• Defects 42%
• Stoichiometry 41%
• Temperature 37%
• Partial pressure 36%
• Crystalline materials 32%
• X ray diffraction 30%
• Substrates 21%
• Gases 17%

Chemical Compounds

• Annealing 72%
• Photoluminescence 71%
• Optical Property 67%
• Emission Peak 49%
• Dioxygen 45%
• Partial Pressure 44%
• Grain Size 43%
• Reaction Stoichiometry 37%
• Flow 29%
• Pressure 26%
• Gas 24%
• X-Ray Diffraction 22%
• Liquid Film 22%

Physics & Astronomy

• ambient temperature 90%
• optimization 60%
• augmentation 56%
• annealing 55%
• thin films 47%
• partial pressure 29%
• temperature 27%
• photoluminescence 21%
• oxygen 18%
• defects 17%
• stoichiometry 14%
• gas pressure 14%
• grain size 11%
• diffraction 8%
• x rays 6%