Abstract
An experimental technique for the fatigue testing of micro- electromechanical systems (MEMS) in liquid environments is described in this paper. A bulk-micromachined MEMS tensile specimen with integral grips was fabricated, and tensile-tensile fatigue tests were performed in air and in a saline solution. The fatigue life of the 200-nm thick aluminum specimen was observed to range from 1.2 × 10 6 to 2.2 × 10 6 cycles when tested at equal values of the mean and alternating stresses of 0.13 GPa.
Original language | English (US) |
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Article number | 6150988 |
Pages (from-to) | 520-522 |
Number of pages | 3 |
Journal | Journal of Microelectromechanical Systems |
Volume | 21 |
Issue number | 3 |
DOIs | |
State | Published - 2012 |
Bibliographical note
Funding Information:Manuscript received August 23, 2011; accepted November 16, 2011. Date of publication February 10, 2012; date of current version May 28, 2012. This work was supported in part by the National Science Foundation under Award Number CMS-0300125. Subject Editor C. Mastrangelo.
Keywords
- Corrosion
- fatigue
- microelectromechanical systems (MEMS)
- reliability
- thin film