Abstract
This paper reviews the current state of ferroelectric-based microactuators. The advantages of ferroelectric-based microactuation are considered. Several actuator concepts are discussed including unimorph-based cantilever actuators, membrane-based micropumps, linear positioning actuators using folded geometries of cascaded elementary actuators for both in-plane and out-of-plane displacements, linear stepper motors using inch-worm geometries, and ultrasonic-based micromotors. Optimistic, order-of-magnitude estimates of actuator performance are given based on simple, idealized analysis. Processing issues in fabricating ferroelectric-based microactuators are also considered.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 179-190 |
| Number of pages | 12 |
| Journal | Integrated Ferroelectrics |
| Volume | 11 |
| Issue number | 1-4 |
| DOIs | |
| State | Published - Nov 1995 |
Bibliographical note
Funding Information:This work was partially supported by the National Science Foundation (grant number NSFEID-9212159).