Ferroelectric thin films in microelectromechanical systems applications

D. L. Polla; L. F. Francis

doi:10.1557/S0883769400035934

Ferroelectric thin films in microelectromechanical systems applications

D. L. Polla, L. F. Francis

Chemical Engineering and Materials Science

Research output: Contribution to journal › Article › peer-review

294 Scopus citations

Original language	English (US)
Pages (from-to)	59-65
Number of pages	7
Journal	MRS Bulletin
Volume	21
Issue number	7
DOIs	https://doi.org/10.1557/S0883769400035934
State	Published - Jul 1996

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@article{d65cb2acc6ab4bd78b83dc05170feb12,

title = "Ferroelectric thin films in microelectromechanical systems applications",

author = "Polla, {D. L.} and Francis, {L. F.}",

year = "1996",

month = jul,

doi = "10.1557/S0883769400035934",

language = "English (US)",

volume = "21",

pages = "59--65",

journal = "MRS Bulletin",

issn = "0883-7694",

publisher = "Materials Research Society",

number = "7",

}

TY - JOUR

T1 - Ferroelectric thin films in microelectromechanical systems applications

AU - Polla, D. L.

AU - Francis, L. F.

PY - 1996/7

Y1 - 1996/7

UR - http://www.scopus.com/inward/record.url?scp=0030197147&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0030197147&partnerID=8YFLogxK

U2 - 10.1557/S0883769400035934

DO - 10.1557/S0883769400035934

M3 - Article

AN - SCOPUS:0030197147

SN - 0883-7694

VL - 21

SP - 59

EP - 65

JO - MRS Bulletin

JF - MRS Bulletin

IS - 7

ER -

Ferroelectric thin films in microelectromechanical systems applications

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