Gallium arsenide based micro-accelerometers

T. T. Vu; P. C. Nguyen; L. T. Vu; C. H. Nguyen; J. N.C. Vu; D. L. Polla; P. J. Schiller; S. Stevanovich; H. Y. Li; Y. Q. Yang; R. Harjani

Gallium arsenide based micro-accelerometers

T. T. Vu, P. C. Nguyen, L. T. Vu, C. H. Nguyen, J. N.C. Vu, D. L. Polla, P. J. Schiller, S. Stevanovich, H. Y. Li, Y. Q. Yang, R. Harjani

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Scopus citations

Abstract

Gallium arsenide (GaAs) based microaccelerometers are being developed for guidance and navigation subsystems, and various microsensor systems. The microaccelerometer is a microelectromechanical system (MEMs) micromachined on top of GaAs substrate or GaAs integrated circuits. The MEMS accelerometer is integrated on the same chip as the GaAs readout circuit and the GaAs analog to digital converter. Test and prototype chips are developed.

Original language	English (US)
Title of host publication	Midwest Symposium on Circuits and Systems
Editors	Anon
Publisher	IEEE
Pages	1111-1115
Number of pages	5
Volume	2
State	Published - Dec 1 1997
Event	Proceedings of the 1997 40th Midwest Symposium on Circuits and Systems. Part 1 (of 2) - Sacramento, CA, USA Duration: Aug 3 1997 → Aug 6 1997

Other

Other	Proceedings of the 1997 40th Midwest Symposium on Circuits and Systems. Part 1 (of 2)
City	Sacramento, CA, USA
Period	8/3/97 → 8/6/97

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Vu, TT, Nguyen, PC, Vu, LT, Nguyen, CH, Vu, JNC, Polla, DL, Schiller, PJ, Stevanovich, S, Li, HY, Yang, YQ & Harjani, R 1997, Gallium arsenide based micro-accelerometers. in Anon (ed.), Midwest Symposium on Circuits and Systems. vol. 2, IEEE, pp. 1111-1115, Proceedings of the 1997 40th Midwest Symposium on Circuits and Systems. Part 1 (of 2), Sacramento, CA, USA, 8/3/97.

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abstract = "Gallium arsenide (GaAs) based microaccelerometers are being developed for guidance and navigation subsystems, and various microsensor systems. The microaccelerometer is a microelectromechanical system (MEMs) micromachined on top of GaAs substrate or GaAs integrated circuits. The MEMS accelerometer is integrated on the same chip as the GaAs readout circuit and the GaAs analog to digital converter. Test and prototype chips are developed.",

author = "Vu, {T. T.} and Nguyen, {P. C.} and Vu, {L. T.} and Nguyen, {C. H.} and Vu, {J. N.C.} and Polla, {D. L.} and Schiller, {P. J.} and S. Stevanovich and Li, {H. Y.} and Yang, {Y. Q.} and R. Harjani",

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language = "English (US)",

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T1 - Gallium arsenide based micro-accelerometers

AU - Vu, T. T.

AU - Nguyen, P. C.

AU - Vu, L. T.

AU - Nguyen, C. H.

AU - Vu, J. N.C.

AU - Polla, D. L.

AU - Schiller, P. J.

AU - Stevanovich, S.

AU - Li, H. Y.

AU - Yang, Y. Q.

AU - Harjani, R.

PY - 1997/12/1

Y1 - 1997/12/1

N2 - Gallium arsenide (GaAs) based microaccelerometers are being developed for guidance and navigation subsystems, and various microsensor systems. The microaccelerometer is a microelectromechanical system (MEMs) micromachined on top of GaAs substrate or GaAs integrated circuits. The MEMS accelerometer is integrated on the same chip as the GaAs readout circuit and the GaAs analog to digital converter. Test and prototype chips are developed.

AB - Gallium arsenide (GaAs) based microaccelerometers are being developed for guidance and navigation subsystems, and various microsensor systems. The microaccelerometer is a microelectromechanical system (MEMs) micromachined on top of GaAs substrate or GaAs integrated circuits. The MEMS accelerometer is integrated on the same chip as the GaAs readout circuit and the GaAs analog to digital converter. Test and prototype chips are developed.

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M3 - Conference contribution

AN - SCOPUS:0031388119

VL - 2

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EP - 1115

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PB - IEEE

T2 - Proceedings of the 1997 40th Midwest Symposium on Circuits and Systems. Part 1 (of 2)

Y2 - 3 August 1997 through 6 August 1997

ER -

Gallium arsenide based micro-accelerometers

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