Abstract
This invited talk focuses on two aspects of generation and growth of nanometer-sized particles in chemically active low-pressure plasmas: the nucleation of initial clusters and the subsequent growth due to coagulation of primary particles. Progress on the modeling of these processes is presented.
Original language | English (US) |
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Pages (from-to) | 1871-1877 |
Number of pages | 7 |
Journal | Pure and Applied Chemistry |
Volume | 71 |
Issue number | 10 |
DOIs | |
State | Published - 1999 |
Bibliographical note
Funding Information:This work was supported in part by NSF grant ECS-9731568 and by the University of Minnesota Supercomputing Institute.