TY - JOUR
T1 - High performance mixed-potential-type Zirconia-based NO2 sensor with self-organizing surface structures fabricated by low energy ion beam etching
AU - You, Rui
AU - Hao, Xidong
AU - Yu, Hongyan
AU - Wang, Baoxu
AU - Lu, Geyu
AU - Liu, Fangmeng
AU - Cui, Tianhong
N1 - Publisher Copyright:
© 2018 Elsevier B.V.
PY - 2018/6/15
Y1 - 2018/6/15
N2 - The mixed-potential-type NO2 sensor based on a yttria-stabilized zirconia (YSZ) electrolyte with NiO sensing electrode and a three-phase boundary (TPB) was fabricated. The ion beam etching (IBE) technology with low energy was employed to etch the YSZ substrate for the first time. The characterization result indicates that the YSZ substrate prepared by argon ion (Ar+) beam with different incident angles (10° and 40°) obtains hollow and spike patterns on the surface, respectively. The sensing performance was improved by the self-organized nanostructures of TPB, which enhances the contact area obviously. The sensor using a YSZ substrate processed by 10° incident angle with 800 eV/60 mA energy demonstrates the largest response compared with other parameters to NO2 at 850 °C. Sensitivity of the sensors is achieved as 40.7 mV/decade, about 1.9 times as the initial YSZ substrate. In addition, the sensor also has good response-recovery transients, repeatability and selectivity.
AB - The mixed-potential-type NO2 sensor based on a yttria-stabilized zirconia (YSZ) electrolyte with NiO sensing electrode and a three-phase boundary (TPB) was fabricated. The ion beam etching (IBE) technology with low energy was employed to etch the YSZ substrate for the first time. The characterization result indicates that the YSZ substrate prepared by argon ion (Ar+) beam with different incident angles (10° and 40°) obtains hollow and spike patterns on the surface, respectively. The sensing performance was improved by the self-organized nanostructures of TPB, which enhances the contact area obviously. The sensor using a YSZ substrate processed by 10° incident angle with 800 eV/60 mA energy demonstrates the largest response compared with other parameters to NO2 at 850 °C. Sensitivity of the sensors is achieved as 40.7 mV/decade, about 1.9 times as the initial YSZ substrate. In addition, the sensor also has good response-recovery transients, repeatability and selectivity.
KW - Ion beam etching
KW - Mixed-potential
KW - NO sensing
KW - Self-organized nanostructure
KW - Yttria-stabilized-zirconia
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U2 - 10.1016/j.snb.2018.02.104
DO - 10.1016/j.snb.2018.02.104
M3 - Article
AN - SCOPUS:85042514868
SN - 0925-4005
VL - 263
SP - 445
EP - 451
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
ER -