Integration of thin-film galfenol with MEMS cantilevers for magnetic actuation

Rajneeta R. Basantkumar; Bethanie J. Hills Stadler; William P. Robbins; Eric M. Summers

doi:10.1109/TMAG.2006.879666

Integration of thin-film galfenol with MEMS cantilevers for magnetic actuation

Rajneeta R. Basantkumar, Bethanie J. Hills Stadler, William P. Robbins, Eric M. Summers

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

69 Scopus citations

Abstract

Galfenol (Fe_1-xGa_x, where x ranges from 0.19 to 0.30) thin films have been successfully fabricated onto thin glasscover slides using RF sputtering. The Ga composition in the thin films was controlled by the forward power. The films had a preferred (110) orientation. The magnetic response as a function of applied magnetic field was examined using vibrating sample magnetometry (VSM). The crystallography and composition of these films were measured using X-ray (XRD) and electron diffractions, and energy dispersive spectroscopy (EDS), respectively. A capacitance bridge method was used to measure saturation magnetostrictions of up to 147 ppm. Finally, the thin films of Galfenol were integrated with MEMS cantilevers for magnetic actuation.

Original language	English (US)
Pages (from-to)	3102-3104
Number of pages	3
Journal	IEEE Transactions on Magnetics
Volume	42
Issue number	10
DOIs	https://doi.org/10.1109/TMAG.2006.879666
State	Published - Oct 2006

Bibliographical note

Funding Information:
This work was supported in part by the office of Naval Research for funding through ETREMA Products, Inc., Ames, IA under N00014-C-0165. The authors would like to thank the Office of Naval Research for funding through ETREMA Products, Inc. The authors also thank Prof. J. Talghader (University of Minnesota) for providing the mask.

Keywords

Galfenol
MEMS
Magnetostriction

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title = "Integration of thin-film galfenol with MEMS cantilevers for magnetic actuation",

abstract = "Galfenol (Fe1-xGax, where x ranges from 0.19 to 0.30) thin films have been successfully fabricated onto thin glasscover slides using RF sputtering. The Ga composition in the thin films was controlled by the forward power. The films had a preferred (110) orientation. The magnetic response as a function of applied magnetic field was examined using vibrating sample magnetometry (VSM). The crystallography and composition of these films were measured using X-ray (XRD) and electron diffractions, and energy dispersive spectroscopy (EDS), respectively. A capacitance bridge method was used to measure saturation magnetostrictions of up to 147 ppm. Finally, the thin films of Galfenol were integrated with MEMS cantilevers for magnetic actuation.",

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author = "Basantkumar, {Rajneeta R.} and {Hills Stadler}, {Bethanie J.} and Robbins, {William P.} and Summers, {Eric M.}",

note = "Funding Information: This work was supported in part by the office of Naval Research for funding through ETREMA Products, Inc., Ames, IA under N00014-C-0165. The authors would like to thank the Office of Naval Research for funding through ETREMA Products, Inc. The authors also thank Prof. J. Talghader (University of Minnesota) for providing the mask.",

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AU - Robbins, William P.

AU - Summers, Eric M.

N1 - Funding Information: This work was supported in part by the office of Naval Research for funding through ETREMA Products, Inc., Ames, IA under N00014-C-0165. The authors would like to thank the Office of Naval Research for funding through ETREMA Products, Inc. The authors also thank Prof. J. Talghader (University of Minnesota) for providing the mask.

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AB - Galfenol (Fe1-xGax, where x ranges from 0.19 to 0.30) thin films have been successfully fabricated onto thin glasscover slides using RF sputtering. The Ga composition in the thin films was controlled by the forward power. The films had a preferred (110) orientation. The magnetic response as a function of applied magnetic field was examined using vibrating sample magnetometry (VSM). The crystallography and composition of these films were measured using X-ray (XRD) and electron diffractions, and energy dispersive spectroscopy (EDS), respectively. A capacitance bridge method was used to measure saturation magnetostrictions of up to 147 ppm. Finally, the thin films of Galfenol were integrated with MEMS cantilevers for magnetic actuation.

KW - Galfenol

KW - MEMS

KW - Magnetostriction

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Integration of thin-film galfenol with MEMS cantilevers for magnetic actuation

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