Abstract
The spatial distribution of aerosol particles downstream of a critical orifice has been experimentally investigated. The measurements were performed by filtering the aerosol and visualizing the filter deposits. Measurements were made for a range of flow rates, pressures, and particle sizes. The most significant observation was that the particle spatial distributions changed from uniform to nonuniform when the downstream pressure was lowered below about 10 torr. Similar observations were made using in-situ particle monitors. These results may have significance for understanding particulate contamination in vacuum-based semiconductor process equipment.
Original language | English (US) |
---|---|
Pages (from-to) | 479-488 |
Number of pages | 10 |
Journal | Aerosol Science and Technology |
Volume | 28 |
Issue number | 6 |
DOIs | |
State | Published - Jan 1 1998 |
Bibliographical note
Funding Information:This work was supported Jinancially by a grant &on1 the Microconturnination Reseurck Consortium ut the Ukiver-sity of' Minnesota. The support of the Conso&un is grate-fidly ucknowled&.