| Original language | English (US) |
|---|---|
| Pages (from-to) | 2280-2284 |
| Number of pages | 5 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 5 |
| Issue number | 4 |
| DOIs | |
| State | Published - Jul 1 1987 |
| Externally published | Yes |
Mass spectrometric and ion energy diagnostics in the study of plasma etching and polymerization
L. M. Ferreiro, D. W. Ernie, J. F. Evans
Research output: Contribution to journal › Article › peer-review
13
Scopus
citations