MEMS-based X-ray optics for future astronomical missions

Yuichiro Ezoe; Ikuyuki Mitsuishi; Kensuke Ishizu; Teppei Moriyama; Kazuhisa Mitsuda; Noriko Y. Yamasaki; Takaya Ohashi; Mitsuhiro Horade; Susumu Sugiyama; Raul E. Riveros; Taylor Boggs; Hitomi Yamaguchi; Yoshiaki Kanamori; Nicholas T. Gabriel; Joseph J Talghader; Kohei Morishita; Kazuo Nakajima; Ryutaro Maeda

doi:10.1109/OMEMS.2010.5672121

MEMS-based X-ray optics for future astronomical missions

Yuichiro Ezoe, Ikuyuki Mitsuishi, Kensuke Ishizu, Teppei Moriyama, Kazuhisa Mitsuda, Noriko Y. Yamasaki, Takaya Ohashi, Mitsuhiro Horade, Susumu Sugiyama, Raul E. Riveros, Taylor Boggs, Hitomi Yamaguchi, Yoshiaki Kanamori, Nicholas T. Gabriel, Joseph J Talghader, Kohei Morishita, Kazuo Nakajima, Ryutaro Maeda

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

X-ray optics based on MEMS technologies can provide future astronomical missions with ultra light-weight and high-performance optical systems. Curvilinear micropores vertical to a thin wafer are made by using DRIE (Deep Reactive Ion Etching) or X-ray LIGA. The side walls are smoothed by using magnetic field assisted finishing and annealing technologies in order that the walls can reflect X-rays. Two or four such wafers are bent to spherical shapes with different curvature of radii and stacked, to focus parallel X-rays from astronomical objects by multiple reflections. In this paper, the concept and recent advances of the MEMS X-ray optics are reviewed.

Original language	English (US)
Title of host publication	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
Pages	191-192
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2010.5672121
State	Published - 2010
Event	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 - Sapporo, Japan Duration: Aug 9 2010 → Aug 12 2010

Publication series

Name	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010

Other

Other	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
Country/Territory	Japan
City	Sapporo
Period	8/9/10 → 8/12/10

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Ezoe, Y., Mitsuishi, I., Ishizu, K., Moriyama, T., Mitsuda, K., Yamasaki, N. Y., Ohashi, T., Horade, M., Sugiyama, S., Riveros, R. E., Boggs, T., Yamaguchi, H., Kanamori, Y., Gabriel, N. T., Talghader, J. J., Morishita, K., Nakajima, K., & Maeda, R. (2010). MEMS-based X-ray optics for future astronomical missions. In 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 (pp. 191-192). Article 5672121 (2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010). https://doi.org/10.1109/OMEMS.2010.5672121

MEMS-based X-ray optics for future astronomical missions. / Ezoe, Yuichiro; Mitsuishi, Ikuyuki; Ishizu, Kensuke et al.
2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010. 2010. p. 191-192 5672121 (2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ezoe, Y, Mitsuishi, I, Ishizu, K, Moriyama, T, Mitsuda, K, Yamasaki, NY, Ohashi, T, Horade, M, Sugiyama, S, Riveros, RE, Boggs, T, Yamaguchi, H, Kanamori, Y, Gabriel, NT, Talghader, JJ, Morishita, K, Nakajima, K & Maeda, R 2010, MEMS-based X-ray optics for future astronomical missions. in 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010., 5672121, 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010, pp. 191-192, 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010, Sapporo, Japan, 8/9/10. https://doi.org/10.1109/OMEMS.2010.5672121

Ezoe Y, Mitsuishi I, Ishizu K, Moriyama T, Mitsuda K, Yamasaki NY et al. MEMS-based X-ray optics for future astronomical missions. In 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010. 2010. p. 191-192. 5672121. (2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010). doi: 10.1109/OMEMS.2010.5672121

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abstract = "X-ray optics based on MEMS technologies can provide future astronomical missions with ultra light-weight and high-performance optical systems. Curvilinear micropores vertical to a thin wafer are made by using DRIE (Deep Reactive Ion Etching) or X-ray LIGA. The side walls are smoothed by using magnetic field assisted finishing and annealing technologies in order that the walls can reflect X-rays. Two or four such wafers are bent to spherical shapes with different curvature of radii and stacked, to focus parallel X-rays from astronomical objects by multiple reflections. In this paper, the concept and recent advances of the MEMS X-ray optics are reviewed.",

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AU - Mitsuishi, Ikuyuki

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AU - Moriyama, Teppei

AU - Mitsuda, Kazuhisa

AU - Yamasaki, Noriko Y.

AU - Ohashi, Takaya

AU - Horade, Mitsuhiro

AU - Sugiyama, Susumu

AU - Riveros, Raul E.

AU - Boggs, Taylor

AU - Yamaguchi, Hitomi

AU - Kanamori, Yoshiaki

AU - Gabriel, Nicholas T.

AU - Talghader, Joseph J

AU - Morishita, Kohei

AU - Nakajima, Kazuo

AU - Maeda, Ryutaro

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MEMS-based X-ray optics for future astronomical missions

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