Micromachined antennas with reduced effective dielectric constants

Rhonda R Franklin; Linda P.B. Katehi

doi:10.1109/EUMA.1995.336915

Micromachined antennas with reduced effective dielectric constants

Rhonda R Franklin, Linda P.B. Katehi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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Abstract

The objective of this work is to illustrate the capability to develop low cost microstrip antennas that offer improved performance on high dielectric materials by locally reducing the effective dielectric constant. Typically, patch antennas exhibit poor performance on high index materials due to pronounced excitation of surface waves. This paper presents the development and characterization of a microstrip antenna that has been fabricated using Si-based micromachining techniques. Two antennas are designed to operate at similar frequencies where one is implemented on a full thickness silicon substrate while the other is formed on an silicon-air substrate that has a 1:1 thickness ratio. The design and testing procedures are described herein, followed by measured results of the antenna performance.

Original language	English (US)
Title of host publication	1995 25th European Microwave Conference
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	44-47
Number of pages	4
Volume	1
ISBN (Electronic)	9780000000002
DOIs	https://doi.org/10.1109/EUMA.1995.336915
State	Published - Jan 1 1995
Externally published	Yes
Event	25th European Microwave Conference, EuMC 1995 - Bologna, Italy Duration: Sep 4 1995 → …

Other

Other	25th European Microwave Conference, EuMC 1995
Country/Territory	Italy
City	Bologna
Period	9/4/95 → …

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AB - The objective of this work is to illustrate the capability to develop low cost microstrip antennas that offer improved performance on high dielectric materials by locally reducing the effective dielectric constant. Typically, patch antennas exhibit poor performance on high index materials due to pronounced excitation of surface waves. This paper presents the development and characterization of a microstrip antenna that has been fabricated using Si-based micromachining techniques. Two antennas are designed to operate at similar frequencies where one is implemented on a full thickness silicon substrate while the other is formed on an silicon-air substrate that has a 1:1 thickness ratio. The design and testing procedures are described herein, followed by measured results of the antenna performance.

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Micromachined antennas with reduced effective dielectric constants

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