Nanoindentation and microstructural studies of Al/TiN multilayers with unequal volume fractions

D. Bhattacharyya; N. A. Mara; R. G. Hoagland; A. Misra

doi:10.1016/j.scriptamat.2008.01.054

Nanoindentation and microstructural studies of Al/TiN multilayers with unequal volume fractions

D. Bhattacharyya, N. A. Mara, R. G. Hoagland, A. Misra

Chemical Engineering and Materials Science

Research output: Contribution to journal › Article › peer-review

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Abstract

The mechanical behavior of nanoscale Al/TiN multilayers with a thickness ratio of 9:1 deposited by reactive sputter deposition, with TiN layer thicknesses of 1-50 nm, has been evaluated. Hardness values measured by nanoindentation methods showed considerably higher hardness than a rule of mixtures estimate, and increasing hardness with decreasing layer thickness. Microstructural analysis has been performed using transmission electron microscopy (TEM) and high-resolution TEM. A dislocation image force model is used to understand the strengthening mechanisms.

Original language	English (US)
Pages (from-to)	981-984
Number of pages	4
Journal	Scripta Materialia
Volume	58
Issue number	11
DOIs	https://doi.org/10.1016/j.scriptamat.2008.01.054
State	Published - Jun 2008

Bibliographical note

Funding Information:
This research is funded by DOE, Office of Science, Office of Basic Energy Sciences. The authors would also like to acknowledge the very fruitful discussions with Prof. J.P. Hirth, and Dr. Darrick Williams and J.K. Baldwin for their valuable technical help.

Keywords

Al-TiN
Multilayers
Nanoindentation

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title = "Nanoindentation and microstructural studies of Al/TiN multilayers with unequal volume fractions",

abstract = "The mechanical behavior of nanoscale Al/TiN multilayers with a thickness ratio of 9:1 deposited by reactive sputter deposition, with TiN layer thicknesses of 1-50 nm, has been evaluated. Hardness values measured by nanoindentation methods showed considerably higher hardness than a rule of mixtures estimate, and increasing hardness with decreasing layer thickness. Microstructural analysis has been performed using transmission electron microscopy (TEM) and high-resolution TEM. A dislocation image force model is used to understand the strengthening mechanisms.",

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note = "Funding Information: This research is funded by DOE, Office of Science, Office of Basic Energy Sciences. The authors would also like to acknowledge the very fruitful discussions with Prof. J.P. Hirth, and Dr. Darrick Williams and J.K. Baldwin for their valuable technical help.",

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AU - Bhattacharyya, D.

AU - Mara, N. A.

AU - Hoagland, R. G.

AU - Misra, A.

N1 - Funding Information: This research is funded by DOE, Office of Science, Office of Basic Energy Sciences. The authors would also like to acknowledge the very fruitful discussions with Prof. J.P. Hirth, and Dr. Darrick Williams and J.K. Baldwin for their valuable technical help.

PY - 2008/6

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N2 - The mechanical behavior of nanoscale Al/TiN multilayers with a thickness ratio of 9:1 deposited by reactive sputter deposition, with TiN layer thicknesses of 1-50 nm, has been evaluated. Hardness values measured by nanoindentation methods showed considerably higher hardness than a rule of mixtures estimate, and increasing hardness with decreasing layer thickness. Microstructural analysis has been performed using transmission electron microscopy (TEM) and high-resolution TEM. A dislocation image force model is used to understand the strengthening mechanisms.

AB - The mechanical behavior of nanoscale Al/TiN multilayers with a thickness ratio of 9:1 deposited by reactive sputter deposition, with TiN layer thicknesses of 1-50 nm, has been evaluated. Hardness values measured by nanoindentation methods showed considerably higher hardness than a rule of mixtures estimate, and increasing hardness with decreasing layer thickness. Microstructural analysis has been performed using transmission electron microscopy (TEM) and high-resolution TEM. A dislocation image force model is used to understand the strengthening mechanisms.

KW - Al-TiN

KW - Multilayers

KW - Nanoindentation

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Nanoindentation and microstructural studies of Al/TiN multilayers with unequal volume fractions

Abstract

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Keywords

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