Abstract
Nanoscale self-folding of electron-beam lithography patterned templates is used to create 3D devices for optics and biosensing.
Original language | English (US) |
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Pages (from-to) | 1943-1948 |
Number of pages | 6 |
Journal | Small |
Volume | 7 |
Issue number | 14 |
DOIs | |
State | Published - Jul 18 2011 |
Keywords
- lithography
- metamaterials
- nanofabrication
- patterning
- plasmonics
- self-assembly
- self-folding