Engineering & Materials Science
Chemical vapor deposition
100%
Nucleation
90%
Numerical models
70%
Silicon
67%
Gases
49%
Silanes
48%
Hydrogen
22%
Flow simulation
21%
Flow rate
14%
Coagulation
12%
Aerosols
11%
Temperature
11%
Helium
10%
Atoms
9%
Pyrolysis
9%
Water
5%
Physics & Astronomy
vapor phases
68%
vapor deposition
65%
nucleation
64%
silicon
46%
silanes
41%
stagnation point
22%
hydrogen
17%
flow velocity
15%
gases
14%
simulation
10%
coagulation
10%
gas temperature
10%
pyrolysis
9%
aerosols
9%
helium
7%
wafers
7%
moments
6%
temperature
5%
water
5%
atoms
4%
Chemical Compounds
Chemical Vapour Deposition
77%
Nucleation
70%
Pressure
49%
Silane
27%
Gas
20%
Simulation
18%
Flow Kinetics
14%
Flow
12%
Silicon Atom
11%
Coagulation
9%
Hydrogen
9%
Pyrolysis
6%
Molecular Cluster
6%