Abstract
The transport of nanoparticles is simulated under conditions of plasma-enhanced chemical vapor deposition. A fluid model solves the spatial and periodic variation in plasma properties and a Monte Carlo method is applied to simulate momentum and charge transfer collisions between nanoparticles and surrounding plasma species. Electrostatic trapping and particle deposition are observed and simulation results reveal the motion of individual nanoparticles.
Original language | English (US) |
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Pages (from-to) | 398-399 |
Number of pages | 2 |
Journal | IEEE Transactions on Plasma Science |
Volume | 33 |
Issue number | 2 I |
DOIs | |
State | Published - Apr 2005 |
Bibliographical note
Funding Information:Manuscript received July 2, 2004; revised November 30, 2004. This work was supported in part by the National Science Foundation under IGERT Grant DGE-0114372, in part by the Department of Energy under Grant DE-FG02-00ER54583, and in part by the Minnesota Supercomputing Institute.
Keywords
- Monte Carlo
- Nanoparticle
- Plasma-enhanced chemical vapor deposition
- Thermophoresis