Particle nucleation and growth in dusty plasmas: On the importance of charged-neutral interactions

Steven L. Girshick

Research output: Contribution to journalReview articlepeer-review

24 Scopus citations

Abstract

Particle nucleation and growth in gases involves nucleation via growth of small molecular or ionic clusters, growth by vapor deposition on nanoparticle surfaces, and coagulation due to collisions between nanoparticles. Under typical conditions that apply in low-pressure nonthermal plasmas, all three of these phenomena are dominated by interactions between negatively charged bodies (anion clusters or nanoparticles) and neutral ones (molecules or nanoparticles), with collision rates enhanced by the dipole or image potential induced in the neutral collision partner. The current understanding of these phenomena is reviewed, with a focus on silane-containing plasmas in which silicon nanoparticles nucleate and grow.

Original languageEnglish (US)
Article number011001
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume38
Issue number1
DOIs
StatePublished - Jan 1 2020

Bibliographical note

Publisher Copyright:
© 2019 Author(s).

Fingerprint

Dive into the research topics of 'Particle nucleation and growth in dusty plasmas: On the importance of charged-neutral interactions'. Together they form a unique fingerprint.

Cite this