TY - GEN
T1 - Performance and reliability of MEMS coatings in liquids
AU - Ali, S. Mubassar
AU - Mantell, Susan C
AU - Longmire, Ellen K
PY - 2008/12/1
Y1 - 2008/12/1
N2 - Reliability of MEMS in liquids is an important concern for MEMS operating in harsh environments in petrochemical, biomedical, and defense applications. Our previous studies have demonstrated reliability concerns for silicon microcantilevers in liquid environments such as saline. In this paper, the effect of coatings on reliability of MEMS in liquids, such as DI water and saline, is compared to that in air. Silicon microcantilevers coated with Titanium (Ti) and SU-8 were vibrated in liquids for 108-10 9 cycles. The resonant frequency of the microcantilevers was periodically monitored to evaluate performance. Reliability of microcantilevers coated with Ti and SU-8 was compromised as indicated by a gradual decrease in resonant frequency in liquids. These changes in resonant frequency were attributed to factors such as stress-corrosion cracking, water absorption, and intrinsic stresses.
AB - Reliability of MEMS in liquids is an important concern for MEMS operating in harsh environments in petrochemical, biomedical, and defense applications. Our previous studies have demonstrated reliability concerns for silicon microcantilevers in liquid environments such as saline. In this paper, the effect of coatings on reliability of MEMS in liquids, such as DI water and saline, is compared to that in air. Silicon microcantilevers coated with Titanium (Ti) and SU-8 were vibrated in liquids for 108-10 9 cycles. The resonant frequency of the microcantilevers was periodically monitored to evaluate performance. Reliability of microcantilevers coated with Ti and SU-8 was compromised as indicated by a gradual decrease in resonant frequency in liquids. These changes in resonant frequency were attributed to factors such as stress-corrosion cracking, water absorption, and intrinsic stresses.
UR - http://www.scopus.com/inward/record.url?scp=67649947159&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=67649947159&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2008.4716406
DO - 10.1109/ICSENS.2008.4716406
M3 - Conference contribution
AN - SCOPUS:67649947159
SN - 9781424425808
T3 - Proceedings of IEEE Sensors
SP - 152
EP - 155
BT - 2008 IEEE Sensors, SENSORS 2008
T2 - 2008 IEEE Sensors, SENSORS 2008
Y2 - 26 October 2008 through 29 October 2009
ER -