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Abstract
Poly(cyclohexylethylene)-block-poly(lactide) (PCHE-PLA) block polymers were synthesized through a combination of anionic polymerization, heterogeneous catalytic hydrogenation and controlled ring-opening polymerization. Ordered thin films of PCHE-PLA with ultrasmall hexagonally packed cylinders oriented perpendicularly to the substrate surface were prepared by spin-coating and subsequent solvent vapor annealing for use in two distinct templating strategies. In one approach, selective hydrolytic degradation of the PLA domains generated nanoporous PCHE templates with an average pore diameter of 5 ± 1 nm corroborated by atomic force microscopy and grazing incidence small-angle X-ray scattering. Alternatively, sequential infiltration synthesis (SIS) was employed to deposit Al2O3 selectively into the PLA domains of PCHE-PLA thin films. A combination of argon ion milling and O2 reactive ion etching (RIE) enabled the replication of the Al2O3 nanoarray from the PCHE-PLA template on diverse substrates including silicon and gold with feature diameters less than 10 nm.
Original language | English (US) |
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Pages (from-to) | 7431-7439 |
Number of pages | 9 |
Journal | ACS Applied Materials and Interfaces |
Volume | 8 |
Issue number | 11 |
DOIs | |
State | Published - Mar 30 2016 |
Bibliographical note
Publisher Copyright:© 2016 American Chemical Society.
Keywords
- atomic layer deposition
- block polymer
- nanolithography
- nanopores
- selective infiltration synthesis
- self-assembly
- solvent vapor annealing
How much support was provided by MRSEC?
- Shared
Reporting period for MRSEC
- Period 3
PubMed: MeSH publication types
- Journal Article
- Research Support, Non-U.S. Gov't
- Research Support, U.S. Gov't, Non-P.H.S.
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MRSEC IRG-3: Hierarchical Multifunctional Macromolecular Materials
Reineke, T. M., Bates, F. S., Dorfman, K., Dutcher, C. S., Hillmyer, M. A., Lodge, T., Morse, D. C., Siepmann, I., Barreda, L. & Ganewatta, M. S.
1/1/98 → …
Project: Research project
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