Preparation of large area β -SiC film by hot filament assisted with radio frequency plasma CVD

Physics & Astronomy

• radio frequencies 63%
• filaments 63%
• vapor deposition 56%
• preparation 53%
• atoms 24%
• silicon carbides 23%
• homogeneity 23%
• adjusting 19%
• vapors 18%
• nucleation 18%
• microscopy 17%
• carbon 16%
• silicon 13%
• diffraction 13%
• x rays 11%

Engineering & Materials Science

• Chemical vapor deposition 85%
• Plasmas 67%
• Atoms 50%
• Substrates 34%
• Microscopic examination 26%
• Silicon carbide 26%
• Nucleation 25%
• X ray diffraction 24%
• Vapors 21%
• Silicon 19%
• Carbon 18%

Chemical Compounds

• Plasma Chemical Vapour Deposition 100%
• Filament 73%
• Liquid Film 35%
• Hot Filament Vapor Deposition 34%
• Silicon Carbide 27%
• Homogeneity 21%
• Nucleation 20%
• Force 16%
• Plasma 15%
• X-Ray Diffraction 12%
• Carbon Atom 11%
• Surface 7%