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Abstract
Traditional one-step annealing of ultrathin amorphous Y–Fe–O films on Si has been reported to yield ‘incomplete crystallization’. Here, it is shown that films produced by standard anneals (e.g.: 800°C, 3 min) actually contain yttrium iron garnet (YIG) crystallites in a nanocrystalline non-garnet matrix. During in situ TEM laser annealing, a low-temperature pre-anneal enabled subsequent YIG crystallization at velocities of 280 nm/s that prevented the formation of the nanocrystalline matrix. From these results, a two-step rapid thermal anneal was identified (400°C, 3 min; 800°C, 3 min) that successfully produces phase-pure garnet films on SiO2 on Si.
Original language | English (US) |
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Pages (from-to) | 379-385 |
Number of pages | 7 |
Journal | Materials Research Letters |
Volume | 5 |
Issue number | 6 |
DOIs | |
State | Published - Nov 2 2017 |
Bibliographical note
Publisher Copyright:© 2017 The Author(s). Published by Informa UK Limited, trading as Taylor & Francis Group.
Keywords
- crystallization
- in situ TEM
- magnetic insulator
- rapid thermal annealing
- YIG
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Reporting period for MRSEC
- Period 3