Spectral Decomposition of Aberrated Wavefronts from Actuated Micromirrors

Merlin L. Mah; Joseph J. Talghader

doi:10.1109/OMN.2018.8454592

Spectral Decomposition of Aberrated Wavefronts from Actuated Micromirrors

Merlin L. Mah, Joseph J. Talghader

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Aberrated optics degrade the cavity finesse and point spread function of any optical system. It is frequently overlooked that the phase errors of these aberrations cause characteristic spectral features that can be observed and measured by an optical cavity. A general theory of the spectral decomposition of aberrations is developed and applied to an electrically deformable membrane feeding a high-finesse resonator. The micromirror, which consists of a 1 cm metallized SiN_x electrostatically-Actuated membrane with phase offsets of about 1.5μm, leads to optical power being distributed to over twenty higher-order Laguerre-Gaussian cavity modes.

Original language	English (US)
Title of host publication	International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings
Publisher	IEEE Computer Society
ISBN (Print)	9781509063727
DOIs	https://doi.org/10.1109/OMN.2018.8454592
State	Published - Sep 4 2018
Event	23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Lausanne, Switzerland Duration: Jul 29 2018 → Aug 2 2018

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
Volume	2018-July
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Other

Other	23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018
Country/Territory	Switzerland
City	Lausanne
Period	7/29/18 → 8/2/18

Bibliographical note

Publisher Copyright:
© 2018 IEEE.

Keywords

Gaussian beam mode analysis
Optical resonators
aberrations
microelectromechanical systems

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10.1109/OMN.2018.8454592

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Spectral Decomposition of Aberrated Wavefronts from Actuated Micromirrors. / Mah, Merlin L.; Talghader, Joseph J.
International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings. IEEE Computer Society, 2018. 8454592 (International Conference on Optical MEMS and Nanophotonics; Vol. 2018-July).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Mah, ML & Talghader, JJ 2018, Spectral Decomposition of Aberrated Wavefronts from Actuated Micromirrors. in International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings., 8454592, International Conference on Optical MEMS and Nanophotonics, vol. 2018-July, IEEE Computer Society, 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018, Lausanne, Switzerland, 7/29/18. https://doi.org/10.1109/OMN.2018.8454592

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AB - Aberrated optics degrade the cavity finesse and point spread function of any optical system. It is frequently overlooked that the phase errors of these aberrations cause characteristic spectral features that can be observed and measured by an optical cavity. A general theory of the spectral decomposition of aberrations is developed and applied to an electrically deformable membrane feeding a high-finesse resonator. The micromirror, which consists of a 1 cm metallized SiNx electrostatically-Actuated membrane with phase offsets of about 1.5μm, leads to optical power being distributed to over twenty higher-order Laguerre-Gaussian cavity modes.

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Spectral Decomposition of Aberrated Wavefronts from Actuated Micromirrors

Abstract

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Keywords

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