Surface smoothening mechanism of plasma-deposited amorphous silicon thin films

Mayur S. Valipa, Tamas Bakos, Eray S. Aydil, Dimitrios Maraudas

Research output: Contribution to conference › Paper › peer-review

Original language	English (US)
Pages	228
Number of pages	1
State	Published - 2005
Event	05AIChE: 2005 AIChE Annual Meeting and Fall Showcase - Cincinnati, OH, United States Duration: Oct 30 2005 → Nov 4 2005

Other	05AIChE: 2005 AIChE Annual Meeting and Fall Showcase
Country/Territory	United States
City	Cincinnati, OH
Period	10/30/05 → 11/4/05

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title = "Surface smoothening mechanism of plasma-deposited amorphous silicon thin films",

author = "Valipa, {Mayur S.} and Tamas Bakos and Aydil, {Eray S.} and Dimitrios Maraudas",

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