Deposition of hafnium oxide from Hf t -butoxide and nitric oxide

Engineering & Materials Science

• Hafnium oxides 100%
• Nitric oxide 77%
• Nitrides 68%
• Oxides 48%
• Hafnium 44%
• Leakage currents 30%
• Contamination 27%
• Nitrogen 26%
• Carbon 21%

Chemical Compounds

• Hafnium Atom 67%
• Nitride 54%
• Nitric Oxide 54%
• Leakage Current 37%
• Oxide 30%
• Nitrogen 17%
• Carbon Atom 13%
• Reduction 12%
• Amount 12%

Physics & Astronomy

• hafnium oxides 77%
• nitric oxide 69%
• nitrides 26%
• oxides 17%
• hafnium 17%
• oxynitrides 16%
• contamination 12%
• leakage 11%
• nitrogen 10%
• carbon 9%